I think I solved the problem.
example.com
subdomain1.example.com
subdomain2.example.com
add as.
then generate the ssl certificates. (example.com will not be created.)
Redirect example.com to subdomain1.example.com
subdomain1.example.com
subdomain2.example.com
delete the domains and add them again in order.
subdomain1.example.com
subdomain2.example.com
If you do it this way, ssl will be created for each subdomain and you will not get 404 errors.
**I don't speak English, sorry for my typos.